Fan filter unit

Filter ceiling grid of a cleanroom for microelectronic manufacturing with filter fan units installed

A fan filter unit (FFU) is a of type of air filtering equipment. It is used to supply purified air to cleanrooms or microenvironments by filtering out harmful airborne particles from recirculating air. The units are installed within the system's ceiling or floor grid. Large cleanrooms require a proportionally large number of FFUs, which in some cases may range from several hundred to several thousand.[1][2] Units often contain their own pre-filter, HEPA filter and internally controllable fan air distribution.[3][4]

FFUs can be used in place of a more conventional recirculating air unit such as a ducted or plenum air system. FFUs are often used because of height restrictions in the space; they are the only systems that work in setups with smaller internal floor dimensions. Additionally when less than 20 filters are involved, a fan powered HEPA, FFU design is generally considered to be less expensive than a more conventional ducted supply system.[5]

References

  1. ↑ Kohli, Rajiv; Mittal, Kashmiri L. (2009). Developments in surface contamination and cleaning - particle deposition, control and removal. William Andrew. p. 164. ISBN 978-1-4377-7830-4.
  2. ↑ "Building and Environment: Performance of large fan-filter units for cleanroom applications". ScienceDirect. Retrieved 2011-10-26.
  3. ↑ "Fan Filter Units". Bassaire.co.uk. Retrieved 2011-10-26.
  4. ↑ CleanRooms 21. Mar 2007. pp. 16–17. ISSN 1043-8017. Retrieved 26 October 2011.
  5. ↑ CleanRooms 22. March 2008. p. 36. ISSN 1043-8017. Retrieved 26 October 2011.
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