Nano and Micro Devices Center

Nano and Micro Devices Center
Type Research Center
Established 2008
Chairman Robert Lindquist
Director John D. Williams
Academic staff
10
Administrative staff
6
Postgraduates 16
Location Huntsville, Alabama, USA
34°43′22″N 86°38′19″W / 34.72278°N 86.63861°W / 34.72278; -86.63861Coordinates: 34°43′22″N 86°38′19″W / 34.72278°N 86.63861°W / 34.72278; -86.63861
Campus University of Alabama in Huntsville main campus
Website http://nmdc.uah.edu

The Nano and Micro Devices Center (NMDC) is a research center located at the University of Alabama in Huntsville. The center forms the backbone of nanotechnology research in the university. It operates a level 4 clean room as well as several other lab facilities.

Objectives

The objective of the center is to effectively integrate the expertise in electrical, chemical, and materials engineering, biology, chemistry and physics towards the development and research in the fields of micro electro-mechanical systems (MEMS) and nanotechnology.[1][2]

Facilities

A Reactive Ion Etcher (RIE) inside the cleanroom facility

The center operates a clean room that is equipped with microfabrication machines that perform thin film deposition, photolithography, dry and wet etching, and metrology measurements. It also operates a dark room for wet etching, electroplating and porous silicon fabrication. The facilities are utilized by organizations based in north Alabama. The processes performed in such a cleanroom level may be classified into:[3]

References

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