Oxalyl fluoride

Oxalyl fluoride
Names
IUPAC name
Oxalyl difluoride
Other names
Oxalyl fluoride, ethanedioyl difluoride
Identifiers
359-40-0 YesY
ChemSpider 9287 N
EC Number 206-630-4
Jmol interactive 3D Image
PubChem 9668
Properties
C2F2O2
Molar mass 94.017 g/mol
Melting point −3 °C (27 °F; 270 K)
Boiling point 26.6 °C (79.9 °F; 299.8 K)
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
N verify (what is YesYN ?)
Infobox references

Oxalyl fluoride is a fluorinated derivative of oxalic acid. It is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[1][2]

See also

References

  1. Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
  2. Simon Karecki, Ritwik Chatterjee, Laura Pruette, Rafael Reif, Terry Sparks, Laurie Beu, Victor Vartanian, and Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141–G149. doi:10.1149/1.1348263.


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